ACM Research Delivered Its First High-Throughput Ultra Lith KrF Track System to a Leading Chinese Logic Wafer Fab Customer

New Ultralith _Krf Monitor system delivers high-throughput efficiency with patented platform design and stimulates superior course of management for grownup lithography purposes

Fremont, California, September 7, 2025 (Globe Newswire) – ACM Research, Inc. ) _Krf Monitor system, designed to assist the manufacturing of front-end semiconductor. The brand new system is increasing the product line of ACM lithography and delivers high-throughput efficiency, superior thermal management and real-time course of management and monitoring. The primary system was despatched in September 2025 to a number one Chinese language Logic Wafer FAB buyer.

ACM’s Extremely Lith _Krf Monitor system builds on the confirmed structure and course of efficiency of the ACM Arf monitor platform, which efficiently accomplished the demo-line course of verification with a number one Chinese language buyer on the finish of 2024. This method demonstrated sub-anxo-level coating uniformity, superior thermal management and ASML scanner-outlined CD-Matching capabilities for designing the KRF platform within the KRF platform.

“The launch of ACM’s Extremely Lith _Krf Monitor system expands the presence of ACM in front-end course of gear and displays our dedication to sort out a wider vary of lithography challenges, “stated Dr. David Wang, President and Chief Government Officer of ACM.” KRF lithography stays important for adults, of which ACM believes it’s a massive and rising a part of the worldwide semiconductor output. By providing each ARF and KRF monitor programs, ACM makes seamless FAB integration and larger flexibility of manufacturing attainable in varied purposes. “

ACM’s Extremely Lith _Krf Monitor system has a versatile course of module configuration, together with 12 spin coaters and 12 builders (12C12D), supported by 54 scorching plates which can be able to low, medium and excessive temperature processing with main thermal uniformity. The system reaches transit bigger than 300 waffles per hour (WPH) and comprises ACM’s personal again -side particle removing unit (BPRV) know-how to attenuate the chance of cross -contamination. As well as, the Built-in Wafer Scale Outsor Inspection (WSOI) Unit Actual-Time Course of Variation Detection and Return Incapacity Monitoring makes bettering course of stability and manufacturing effectivity.

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About ACM Analysis, Inc.

ACM develops, produces and sells semiconductor course of gear that cleaning, electropatization, stress-free sharpening, vertical oven processes, monitor, PECVD and waffle and panel stage Packaging instruments, superior and semi-critical semiconductor machine manufacturing, produces and sells safety. ACM strives to ship tailored, highly effective, value -effective course of options that producers of semiconductors can use in quite a few manufacturing steps to enhance productiveness and product yield. For extra data, go to http://www.acmr.com.

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